Spectro-ellipsometry innovation (Chonbuk National University, Korea)

Spectro-ellipsometry innovation (Chonbuk National University, Korea)
 
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Chonbuk University (South Korea) has significantly improved spectroscopic ellipsometry with an Avantes spectrometer, providing real time phase in-line monitoring capability.

Open here the application note Spectro-ellipsometry_Chonbuk_University_Korea.pdf