Vacuum measurements

Vacuum measurements
Vacuum measurements

Layer thickness, composition, surface finish, light transmission, reflectance, polarization ability: these are some of the important parameters that need to be monitored during coating processes. They all are facilitated by spectroscopy and spectroscopic interferometry. Fiber-optics provide a versatile tool to measure in remote vacuum and clean room chambers.

The illumination and detection can be organized at different fiber positions relative to the coating: to allow specular reflection, diffuse reflection, transmission, polarization, interference, fluorescence and even Raman scattering to be measured. Fiber-optics can be arranged to either monitor several positions or to measure at different spatial positions or masking conditions simultaneously.

For on-line production environments, several fiber-optic sensors can be placed to monitor a production run. Ionic sources, such as plasma sources, can be monitored for spectral emission to confirm their conditional efficiency during the operating process.

A typical application for a vacuum chamber system is monitoring an on-line coating process on a web. For this type of system a vacuum feed-through is used to transfer light into the vacuum area and then passes to the reflectance probe. The reflected light is passed through another vacuum feed-through to a spectrometer, AvaSpec-ULS2048-USB2 or SensLine instrument. The reflectance probe can be easily disconnected using the SMA interconnects. To compensate for fluctuations in the light source, a second channel can be added for light source reference measurements.

Blz 149 Coating II with screenshot v2

Vacuum Bundle

Order code Ava-Vacuum
Spectrometer AvaSpec-ULS2048L-USB2
Grating UA (200-1100 nm), 50 µm slit , DUV coating, DCL-UV/VIS, OSC-UA
Software AvaSoft-Full
Lightsource AvaLight-DH-S
Fiber optics FCR-7UV200-2-ME 
FC-UV600-2 and FC-UV200-2
Vacuum Feedthrough FC-VFT-UV200 and FC-VFT-UV600
4 interconnects