Vacuum Spectroscopy

Vacuum Spectroscopy
 
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Spectroscopic measurements conducted in vacuum environments range from reflection measurements during coating processes through high speed plasma monitoring during a reaction.  Avantes has worked extensively with customers operating in vacuum environments and offers a variety of instruments and accessories to meet the needs of vacuum spectroscopy.

These techniques are frequently used for sophisticated process control monitoring such as end point detection.  This procedure involves monitoring a peak or wavelength range to detect a process inflecton point characterized by a spectral shift which signals the end of the process. High vacuum (~10-3 torr) and ultra-high vacuum (~10−9 torr) measurements require special consideration when selecting a spectrometer and the associated fiber optics used for sampling. Avantes has worked extensively with customers operating in vacuum environments and offers a variety of instruments and accessories to meet the needs of vacuum spectroscopy.